Wei Yang
0000-0002-4267-544X
10 papers found
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Experimental investigation of mode transitions in asymmetric capacitively coupled radio-frequency Ne and CF4 plasmas
Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region
Hybrid simulation of electron energy distributions and plasma characteristics in pulsed RF CCP sustained in Ar and SiH4/Ar discharges
Automatic emissive probe apparatus for efficient plasma potential measurements
A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge
Spatial distributions of plasma parameters in inductively coupled hydrogen discharges with an expansion region
Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled plasmas with argon discharges
Fluid simulation of species concentrations in capacitively coupled N2/Ar plasmas: Effect of gas proportion
Experimental investigations of the plasma radial uniformity in single and dual frequency capacitively coupled argon discharges
Hybrid simulations of solenoidal radio-frequency inductively coupled hydrogen discharges at low pressures
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