Published in

American Institute of Physics, Physics of Plasmas, 12(23), p. 123512

DOI: 10.1063/1.4971782

Links

Tools

Export citation

Search in Google Scholar

Experimental investigations of the plasma radial uniformity in single and dual frequency capacitively coupled argon discharges

Journal article published in 2016 by Kai Zhao, Yong-Xin Liu ORCID, Fei Gao, Gang-Hu Liu, Dao-Man Han, You-Nian Wang ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

Green circle
Preprint: archiving allowed
Upload
Green circle
Postprint: archiving allowed
Upload
Orange circle
Published version: archiving restricted
Upload
Policy details
Data provided by SHERPA/RoMEO