Published in
American Institute of Physics, Journal of Applied Physics, 20(121), p. 203302
DOI: 10.1063/1.4983675
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Fluid simulation of species concentrations in capacitively coupled N2/Ar plasmas: Effect of gas proportion
Journal article published in 2017 by
Ying-Shuang Liang,
Gang-Hu Liu,
Chan Xue,
Yong-Xin Liu 
,
You-Nian Wang
,
You-Nian Wang
This paper was not found in any repository, but could be made available legally by the author.
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