Published in

American Institute of Physics, Physics of Plasmas, 8(24), p. 083517

DOI: 10.1063/1.4993798

Links

Tools

Export citation

Search in Google Scholar

A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge

Journal article published in 2017 by De-Qi Wen, E. Kawamura, M. A. Lieberman, A. J. Lichtenberg, You-Nian Wang ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

Full text: Download

Green circle
Preprint: archiving allowed
Green circle
Postprint: archiving allowed
Orange circle
Published version: archiving restricted
Data provided by SHERPA/RoMEO