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American Institute of Physics, Physics of Plasmas, 11(24), p. 113503

DOI: 10.1063/1.5009416

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Hybrid simulation of electron energy distributions and plasma characteristics in pulsed RF CCP sustained in Ar and SiH4/Ar discharges

Journal article published in 2017 by Xi-Feng Wang ORCID, Wen-Zhu Jia, Yuan-Hong Song, Ying-Ying Zhang, Zhong-Ling Dai, You-Nian Wang ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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