Klaus Ellmer
0000-0002-1874-8741
5 papers found
Refreshing results…
A multifunctional plasma and deposition sensor for the characterization of plasma sources for film deposition and etching
Analysis of the early stages of the rapid, nickel assisted crystallization of WS2 films
Defect analysis by transmission electron microscopy of epitaxial Al-doped ZnO films grown on (0001) ZnO and a-sapphire by RF magnetron sputtering
BiVO4 photoanodes for water splitting with high injection efficiency, deposited by reactive magnetron co-sputtering
Research Update: Inhomogeneous aluminium dopant distribution in magnetron sputtered ZnO:Al thin films and its influence on their electrical properties
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