Sami Suihkonen - Dissemin

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All papers authored by Sami Suihkonen

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2023 Heli Seppänen

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, Igor Prozheev

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, Christoffer Kauppinen

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, Sami Suihkonen

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, Kenichiro Mizohata

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, Harri Lipsanen

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Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

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