Christoffer Kauppinen - Dissemin

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All papers authored by Christoffer Kauppinen

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2023 Heli Seppänen

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, Igor Prozheev

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, Christoffer Kauppinen

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, Sami Suihkonen

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, Kenichiro Mizohata

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, Harri Lipsanen

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Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

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This paper was not found in any repository, but could be made available legally by the author.

2018 Sabbir A. Khan

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, Dmitry B. Suyatin, Jonas Sundqvist, Mariusz Graczyk, Marcel Junige

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, Christoffer Kauppinen

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, Anders Kvennefors, Maria Huffman, Ivan Maximov

High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching

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