Published in
Royal Society of Chemistry, New Journal of Chemistry, 20(41), p. 11926-11933
DOI: 10.1039/c7nj01651d
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Novel single-source precursors for SiBxCyNz film deposition
Journal article published in 2017 by
Ivan S. Merenkov 
,
Boris A. Gostevskii,
Pavel O. Krasnov,
Tamara V. Basova,
Yuri M. Zhukov ,
Igor A. Kasatkin ,
Sergey V. Sysoev,
Victor I. Kosyakov,
Maksim N. Khomyakov,
Marina L. Kosinova
,
Boris A. Gostevskii,
Pavel O. Krasnov,
Tamara V. Basova,
Yuri M. Zhukov ,
Igor A. Kasatkin ,
Sergey V. Sysoev,
Victor I. Kosyakov,
Maksim N. Khomyakov,
Marina L. Kosinova
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Abstract
A novel type of single-source CVD precursor – Me3SiCCB[N(SiMe3)2]2 – has been synthesized and successfully tested for the first time in SiBCN film deposition.