Published in

Apollo - University of Cambridge Repository, 2018

DOI: 10.17863/cam.31885

Royal Society of Chemistry, Nanoscale

DOI: 10.1039/c8nr04665d

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Split resonances for simultaneous detection and control measurements in a single Bulk Acoustic Wave (BAW) sensor.

Journal article published in 2018 by Ewelina Wajs ORCID, Girish Rughoobur ORCID, Andrew J. Flewitt ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5-30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (~1 GHz) and longitudinal (~2 GHz) are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.