Published in
Royal Society of Chemistry, Journal of Materials Chemistry C Materials for optical and electronic devices, 19(5), p. 4677-4690, 2017
DOI: 10.1039/c7tc01200d
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A comprehensive study on the structural evolution of HfO<sub>2</sub>thin films doped with various dopants
Journal article published in 2017 by
M. H. Park 
,
T. Schenk,
C. M. Fancher ,
E. D. Grimley,
C. Zhou,
C. Richter,
J. M. LeBeau,
J. L. Jones ,
T. Mikolajick ,
U. Schroeder
,
T. Schenk,
C. M. Fancher ,
E. D. Grimley,
C. Zhou,
C. Richter,
J. M. LeBeau,
J. L. Jones ,
T. Mikolajick ,
U. Schroeder
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Abstract
Quantitative phase analysis is first performed on doped Hafnia films to elucidate the structural origin of unexpected ferroelectricity.