Published in
Royal Society of Chemistry, Nanoscale, 24(4), p. 7743, 2012
DOI: 10.1039/c2nr32693k
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“In situ” hard mask materials: a new methodology for creation of vertical silicon nanopillar and nanowire arrays
Journal article published in 2012 by
Tandra Ghoshal,
Ramsankar Senthamaraikannan,
Matthew T. Shaw,
Justin D. Holmes,
Michael A. Morris
This paper is available in a repository.
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