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Trans Tech Publications, Key Engineering Materials, (596), p. 73-77, 2013

DOI: 10.4028/www.scientific.net/kem.596.73

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Fabrication of 6-nm-Sized Nanodot Arrays with 12 nm-Pitch along Guide Lines Using both Self-Assembling and Electron Beam-Drawing for 5 Tbit/in<sup>2</sup> Magnetic Recording

Journal article published in 2013 by Sumio Hosaka, Takashi Akahane, Miftakhul Huda Huda ORCID, Takuya Komori, Hui Zhang, You Yin
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

A possibility to fabricate nanodot arrays with a dot size of <10 nm="" and="" a="" dot="" pitch="" of="" 12="" along="" guide="" lines="" has="" been="" studied="" for="" ultrahigh-density="" patterned="" media="" in="" magnetic="" recording="" this="" was="" by="" using="" self-assembling="" block="" copolymers="" polystyrene-poly="" dimethyl="" siloxane="" ps-pdms="" electron="" beam="" eb="" drawing="" with="" hydrogen="" silsesquioxane="" hsq="" negative="" resist="" their="" fusion="" method="" it="" demonstrated="" that="" the="" could="" possibly="" achieve="" 6-nm-sized="" nanodot="" arrays="" 10="" 4="" x="" sup="">2 using self-assembling with PS-PDMS of molecular weight 7000-1500 and EB-drawing for narrow guide lines. These results prove that the fusion method is required for achieving extremely small dot arrays as 5 Tbit/in2magnetic storage devices.Keywords: Nanodot, self-assembly, electron-beam drawing, graphoepitaxy, patterned media, magnetic recording.