Published in
The Electrochemical Society, Electrochemical and Solid-State Letters, 6(12), p. H205
DOI: 10.1149/1.3109624
Links
Tools
Half-Cycle Atomic Layer Deposition Reaction Study Using O[sub 3] and H[sub 2]O Oxidation of Al[sub 2]O[sub 3] on In[sub 0.53]Ga[sub 0.47]As
Journal article published in 2009 by
B. Brennan,
M. Milojevic,
H. C. Kim,
P. K. Hurley 
,
J. Kim,
G. Hughes,
R. M. Wallace
,
J. Kim,
G. Hughes,
R. M. Wallace
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 