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American Institute of Physics, Journal of Applied Physics, 2(105), p. 024510

DOI: 10.1063/1.3068367

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Analysis of electron mobility in HfO2/TiN gate metal-oxide-semiconductor field effect transistors: The influence of HfO2 thickness, temperature and oxide charge

This paper is available in a repository.
This paper is available in a repository.

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Abstract

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