Published in

American Institute of Physics, Journal of Applied Physics, 6(104), p. 064113

DOI: 10.1063/1.2978209

Links

Tools

Export citation

Search in Google Scholar

Electrical, structural, and chemical properties of HfO(2) films formed by electron beam evaporation

This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Green circle
Preprint: archiving allowed
Green circle
Postprint: archiving allowed
Orange circle
Published version: archiving restricted
Data provided by SHERPA/RoMEO