Characterization of SiNx/AlN passivation stack with epitaxial AlN grown on AlGaN/GaN heterojunctions by plasma-enhanced atomic layer deposition
Journal article published in 2015 by
Yunyou Lu 
,
Qimeng Jiang,
Zhikai Tang,
Shu Yang ,
Cheng Liu,
Kevin J. Chen
,
Qimeng Jiang,
Zhikai Tang,
Shu Yang ,
Cheng Liu,
Kevin J. Chen
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