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Trans Tech Publications, Solid State Phenomena, (108-109), p. 223-228, 2005

DOI: 10.4028/www.scientific.net/ssp.108-109.223

Trans Tech Publications, Solid State Phenomena, p. 223-228

DOI: 10.4028/3-908451-13-2.223

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Metastable VO<sub>2</sub> Complexes in Silicon: Experimental and Theoretical Modeling Studies

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We report on a combined experimental and theoretical study of the metastable form of the vacancy-dioxygen defect in Si labeled VO∗ 2. Important new experimental observations are the detection of mixed local vibrational modes of VO∗ 2 in 16O,18O co-doped samples, the determination of the position of LVM bands for the negatively charged defect, and an assignment of an acceptor level at about Ec − 0.05 eV. Defect energetics, electrical levels and LVM frequencies of the VO∗ 2 complex are also investigated by ab-initio density-functional modeling.We find it to be a bistable defect which accounts well for the experimental data. The metastable form produces an acceptor state at 0.05 eV below Ec, and can be thought of as a VO defect perturbed by interstitial oxygen.