Trans Tech Publications, Key Engineering Materials, (643), p. 3-7, 2015
DOI: 10.4028/www.scientific.net/kem.643.3
Full text: Unavailable
We demonstrate the possibility of forming long-range-ordered self-assembled nanodot arrays with dots size of 5 nm and pitches of 10×7.5 nm2using guide line templates and low molecular weight (MW) (4,700–1,200 g/mol) poly (styrene)-poly (dimethylsiloxane) (PS-PDMS) for application in ultrahigh density patterned media. The self-assembled PDMS nanodots are controlled in a long range by varying the heights and gaps of the guide lines. Adopting the 14-nm-high resist guide lines with suitable gaps, the 5-nm-sized and 10×7.5 nm2-pitched self-assembled nanodots were ordered in maximum 7 dot arrays with long-range order. The experimental results demonstrate that the method is possible for achieving patterned media with magnetic recording densities of 8.6 Tbit/in.2using low MW PS-PDMS and slim guide lines.