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Elsevier, Microelectronic Engineering, 9-10(84), p. 1874-1877

DOI: 10.1016/j.mee.2007.04.108

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The influence of HfO2 film thickness on the interface state density and low field mobility of n channel HfO2/TiN gate MOSFETs

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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