Here we demonstrated the fabrication of ultrahigh rate, all-solid-state, planar interdigital graphene-based micro-supercapacitors (MSCs) manufactured by methane plasma-assisted reduction and photolithographic micro-fabrication of graphene oxide films on silicon wafers. Notably, the electrochemical performances of MSCs are significantly enhanced by increasing the number of the interdigital fingers from 8 to 32 and minimizing the finger width from 1175 to 219 μm, highlighting the critical importance of adjusting the number and widths of the fingers in the fabrication of high-performance MSCs. The fabricated graphene-based MSCs delivered an area capacitance of 116 μF/cm2 and a stack capacitance of 25.9 F/cm3. Further, they offered a power density of 1270 W/cm3 that is much higher than electrolytic capacitors, an energy density of ~3.6 mWh/cm3 that is comparable to lithium thin-film batteries, and superior cycling stability of ~98.5% retention after 50 000 cycles. More importantly, the microdevice can well operate at ultrahigh scan rate of up to 2000 V/s, which is three orders of magnitude higher than that of conventional supercapacitors.