Royal Society of Chemistry, CrystEngComm, 30(17), p. 5849-5859, 2015
DOI: 10.1039/c5ce00543d
Full text: Unavailable
Epitaxial GaN layers are grown on amorphous substrate by the combination of MBE and MOCVD. MBE growth step provided uniform, preferred orientation and MOCVD enabled improved crystalline quality.