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Royal Society of Chemistry, Chemical Communications, 34(51), p. 7313-7316

DOI: 10.1039/c5cc00255a

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Patterning of Polymer Brushes Made Easy Using Titanium Dioxide: Direct and Remote Photocatalytic Lithography

Journal article published in 2015 by Guido Panzarasa ORCID, Guido Soliveri ORCID, Katia Sparnacci, Silvia Ardizzone
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Photocatalytic lithography is proved for the realization of micropatterned polymer brushes. Initiator-functionalized titanium dioxide or silicon surfaces are respectively exposed directly to near-UV light through a photomask (direct approach) or through a transparent photoactive TiO2 film (remote approach). Initiator patterns are then amplified as polymer brushes with SI-ATRP. Features down to 10 mu m could be obtained using simple equipment. The process is intrinsically parallel, has high throughput and scalable to wafer size, making it powerful for microfabrication purposes.