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Wiley, ChemPhysChem, 11(9), p. 1524-1527, 2008

DOI: 10.1002/cphc.200800158

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Facile and Controlled Synthesis of Ultra-Thin Low Dielectric Constant Meso/Microporous Silica Films

This paper is available in a repository.
This paper is available in a repository.

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Abstract

Fancy films: Microporous zeolite silicalite-1 nanoparticles with regular particle dimensions are dispersed within self-assembled mesoporous silica thin films in order to fabricate thin films with low dielectric constants. The mesoporous component functions as a binder material which increases the adhesion of the zeolite films to the underlying silicon substrate without augmenting the dielectric constant.