Published in
Royal Society of Chemistry, Nanoscale, 7(14), p. 2826-2836, 2022
DOI: 10.1039/d1nr07274a
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Mid- and far-infrared localized surface plasmon resonances in chalcogen-hyperdoped silicon
Journal article published in 2022 by
Mao Wang 
,
Ye Yu ,
Slawomir Prucnal ,
Yonder Berencén ,
Mohd Saif Shaikh ,
Lars Rebohle ,
Muhammad Bilal Khan ,
Vitaly Zviagin,
René Hübner ,
Alexej Pashkin ,
Artur Erbe ,
Yordan M. Georgiev ,
Marius Grundmann ,
Manfred Helm ,
Robert Kirchner
and other authors.
,
Ye Yu ,
Slawomir Prucnal ,
Yonder Berencén ,
Mohd Saif Shaikh ,
Lars Rebohle ,
Muhammad Bilal Khan ,
Vitaly Zviagin,
René Hübner ,
Alexej Pashkin ,
Artur Erbe ,
Yordan M. Georgiev ,
Marius Grundmann ,
Manfred Helm ,
Robert Kirchner
and other authors.
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Abstract
The mid-infrared localized surface plasmon resonances are realized in hyperdoped Si and can be spectrally tuned by fabricating nano-antenna arrays. Our results are promising for the integration of plasmonic sensors into the on-chip CMOS platform.