Published in
Royal Society of Chemistry, Journal of Materials Chemistry C Materials for optical and electronic devices, 14(10), p. 5627-5635, 2022
DOI: 10.1039/d1tc05872j
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van der Waals 2D metallic materials for low-resistivity interconnects
Journal article published in 2022 by
Yaoqiao Hu 
,
Patrick Conlin ,
Yeonghun Lee ,
Dongwook Kim,
Kyeongjae Cho
,
Patrick Conlin ,
Yeonghun Lee ,
Dongwook Kim,
Kyeongjae Cho
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Abstract
2D metallic materials offer a solution to the problem of poor scalability of elemental metals within ever-downscaling device interconnects. With the absence of surface scattering, they could be used for interconnects in future integrated circuits.