Royal Society of Chemistry, Nanoscale, 17(14), p. 6331-6338, 2022
DOI: 10.1039/d1nr08375a
Full text: Unavailable
Radio frequency sputtering by argon ions on a target consisting of tungsten disulphide can create a single layer of the compound on a 4′′ Si-wafer with one W atom per two S atoms when including hydrogen sulphide in the sputtering atmosphere.