Published in
Royal Society of Chemistry, Dalton Transactions, 14(51), p. 5603-5611, 2022
DOI: 10.1039/d2dt00353h
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Atomic/molecular layer deposition of cerium(iii) hybrid thin films using rigid organic precursors
Journal article published in 2022 by
Parmish Kaur 
,
Arbresha Muriqi ,
Jan-Lucas Wree ,
Ramin Ghiyasi,
Muhammad Safdar,
Michael Nolan ,
Maarit Karppinen ,
Anjana Devi
,
Arbresha Muriqi ,
Jan-Lucas Wree ,
Ramin Ghiyasi,
Muhammad Safdar,
Michael Nolan ,
Maarit Karppinen ,
Anjana Devi
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Abstract
New ALD/MLD processes for Ce-based hybrid thin films using compatible inorganic and organic precursors with findings supported by DFT studies.