Published in
Royal Society of Chemistry, Physical Chemistry Chemical Physics, 31(23), p. 16646-16657, 2021
DOI: 10.1039/d1cp02334a
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Role of low-energy electrons in the solubility switch of Zn-based oxocluster photoresist for extreme ultraviolet lithography
Journal article published in 2021 by
Markus Rohdenburg 
,
Neha Thakur ,
René Cartaya,
Sonia Castellanos ,
Petra Swiderek
,
Neha Thakur ,
René Cartaya,
Sonia Castellanos ,
Petra Swiderek
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Abstract
Electron-induced reactions make an important contribution to the solubility switch of a novel Zn oxocluster resist in extreme ultraviolet lithography (EUVL). The study also gives direct evidence that chain reactions are involved in this process.