Published in
Royal Society of Chemistry, Nanoscale, 3(13), p. 1529-1565, 2021
DOI: 10.1039/d0nr07539f
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Recent Advances in Focused Ion Beam Nanofabrication for Nanostructures and Devices: Fundamentals and Applications
Journal article published in 2020 by
Ping Li 
,
Siyu Chen,
Houfu Dai,
Zhengmei Yang,
Zhiquan Chen ,
Yasi Wang,
Yiqin Chen,
Wenqiang Peng,
Wubin Shan,
Huigao Duan
,
Siyu Chen,
Houfu Dai,
Zhengmei Yang,
Zhiquan Chen ,
Yasi Wang,
Yiqin Chen,
Wenqiang Peng,
Wubin Shan,
Huigao Duan
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Abstract
The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing.