Published in
Royal Society of Chemistry, Journal of Analytical Atomic Spectrometry, 1(36), p. 56-63, 2021
DOI: 10.1039/d0ja00289e
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A correlative method to quantitatively image trace concentrations of elements by combined SIMS-EDX analysis
Journal article published in 2021 by
Lluís Yedra,
C. N. Shyam Kumar 
,
Alisa Pshenova,
Esther Lentzen,
Patrick Philipp,
Tom Wirtz,
Santhana Eswara
,
Alisa Pshenova,
Esther Lentzen,
Patrick Philipp,
Tom Wirtz,
Santhana Eswara
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Abstract
The study demonstrates a new method to quantify Secondary Ion Mass Spectrometry (SIMS) images by using a synergetic combination of Energy Dispersive X-ray spectroscopy (EDX) and SIMS.