Royal Society of Chemistry, Reaction Chemistry and Engineering, 3(6), p. 471-485, 2021
DOI: 10.1039/d0re00327a
Full text: Unavailable
Fabrication of the reaction chamber using silicon carbide. (A) A schematic sketch of the fabrication flow; (B) a photograph of a transparent 6 inch SiC-on-glass wafer; (C) the surface morphology of the SiC film.