Published in
Royal Society of Chemistry, Journal of Materials Chemistry C Materials for optical and electronic devices, 45(8), p. 15884-15919, 2020
DOI: 10.1039/d0tc03689g
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Precursors for Direct-Write Nanofabrication with Electrons
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Abstract
The influence of precursor's chemical composition and side reactions on materials obtained by direct nanoprinting using FEBID techniques is discussed.