Published in
IOP Publishing, Japanese Journal of Applied Physics, SJ(59), p. SJJA01, 2020
DOI: 10.35848/1347-4065/ab8681
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Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Journal article published in 2020 by
Hu Li 
,
Tomoko Ito ,
Kazuhiro Karahashi ,
Munehito Kagaya,
Tsuyoshi Moriya,
Masaaki Matsukuma ,
Satoshi Hamaguchi
,
Tomoko Ito ,
Kazuhiro Karahashi ,
Munehito Kagaya,
Tsuyoshi Moriya,
Masaaki Matsukuma ,
Satoshi Hamaguchi
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