Kazuhiro Karahashi - Dissemin

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All papers authored by Kazuhiro Karahashi

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2023 Akiko Hirata

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, Masanaga Fukasawa

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, Jomar Unico Tercero, Katsuhisa Kugimiya, Yoshiya Hagimoto, Kazuhiro Karahashi

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, Satoshi Hamaguchi

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, Hayato Iwamoto

High-throughput SiN ALE: surface reaction and ion-induced damage generation mechanisms

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2022 Karsten Arts

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, Satoshi Hamaguchi

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, Kazuhiro Karahashi

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, Harm C. M. Knoops

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, Adriaan J. M. Mackus

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, Wilhelmus M. M. (Erwin) Kessels

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Foundations of atomic-level plasma processing in nanoelectronics

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2020 Abdulrahman H. Basher

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, Marjan Krstić

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, Kazuhiro Karahashi

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, Wolfgang Wenzel

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, Satoshi Hamaguchi

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Formation and desorption of nickel hexafluoroacetylacetonate Ni(hfac)2 on a nickel oxide surface in atomic layer etching processes

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Hu Li

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, Kazuhiro Karahashi

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, Munehito Kagaya, Tsuyoshi Moriya, Masaaki Matsukuma

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, Satoshi Hamaguchi

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Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes

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Abdulrahman H. Basher

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, Marjan Krstić

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, Takae Takeuchi

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, Michiro Isobe, Tomoko Ito

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, Masato Kiuchi

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, Kazuhiro Karahashi

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, Wolfgang Wenzel

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, Satoshi Hamaguchi

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Stability of hexafluoroacetylacetone molecules on metallic and oxidized nickel surfaces in atomic-layer-etching processes

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