Published in
Royal Society of Chemistry, Nanoscale, 34(11), p. 16122-16129, 2019
DOI: 10.1039/c9nr04612g
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Wafer-scale and deterministic patterned growth of monolayer MoS2via vapor–liquid–solid method
Journal article published in 2019 by
Shisheng Li 
,
Yung-Chang Lin ,
Xu-Ying Liu ,
Zehua Hu,
Jing Wu,
Hideaki Nakajima ,
Song Liu ,
Toshiya Okazaki ,
Wei Chen ,
Takeo Minari,
Yoshiki Sakuma,
Kazuhito Tsukagoshi,
Kazu Suenaga,
Takaaki Taniguchi,
Minoru Osada
,
Yung-Chang Lin ,
Xu-Ying Liu ,
Zehua Hu,
Jing Wu,
Hideaki Nakajima ,
Song Liu ,
Toshiya Okazaki ,
Wei Chen ,
Takeo Minari,
Yoshiki Sakuma,
Kazuhito Tsukagoshi,
Kazu Suenaga,
Takaaki Taniguchi,
Minoru Osada
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Abstract
2-Inch-wafer-scale MoS2 films and patterned MoS2 monolayers were achieved via a vapor-liquid-solid growth using non-volatile precursors.