Published in
Royal Society of Chemistry, Analyst, 10(144), p. 3323-3333, 2019
DOI: 10.1039/c8an02452a
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Effect of energy per atom (E/n) on the Ar gas cluster ion beam (Ar-GCIB) and O2+ cosputter process
Journal article published in 2019 by
Shin-Kung Wang,
Hsun-Yun Chang,
Yi-Hsuan Chu,
Wei-Lun Kao,
Chen-Yi Wu 
,
Yi-Wei Lee,
Yun-Wen You,
Kuo-Jui Chu,
Shu-Hang Hung,
Jing-Jong Shyue
,
Yi-Wei Lee,
Yun-Wen You,
Kuo-Jui Chu,
Shu-Hang Hung,
Jing-Jong Shyue
This paper was not found in any repository, but could be made available legally by the author.
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Abstract
With optimization, GCIB-O2+ cosputter is a promising technique for preserving molecular structures during ion sputtering and successfully profiled soft materials.