Published in

Royal Society of Chemistry, Nanoscale, 7(11), p. 3261-3267, 2019

DOI: 10.1039/c8nr09174a

Links

Tools

Export citation

Search in Google Scholar

Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

Full text: Download

Green circle
Preprint: archiving allowed
Orange circle
Postprint: archiving restricted
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

MEMS stencil patterning coupled with direct laser writing is used to fabricate 3D microstructures with nanoscale metallic elements.