Published in
Royal Society of Chemistry, Nanoscale, 35(9), p. 12949-12956
DOI: 10.1039/c7nr04417h
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Building with ions: towards direct write of platinum nanostructures using in situ liquid cell helium ion microscopy
Journal article published in 2017 by
Anton V. Ievlev 
,
Jacek Jakowski ,
Matthew J. Burch,
Vighter Iberi,
Holland Hysmith,
David C. Joy,
Bobby G. Sumpter ,
Alex Belianinov,
Raymond R. Unocic ,
Olga S. Ovchinnikova
,
Jacek Jakowski ,
Matthew J. Burch,
Vighter Iberi,
Holland Hysmith,
David C. Joy,
Bobby G. Sumpter ,
Alex Belianinov,
Raymond R. Unocic ,
Olga S. Ovchinnikova
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Abstract
Direct write with liquid precursor using an helium ion beam, allows fabrication of nanostructures with sub-15 nm resolution and high chemical purity.