Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control

Royal Society of Chemistry, Journal of Materials Chemistry C Materials for optical and electronic devices

Journal article published in 2018 by Konstantin V. Egorov, Dmitry S. Kuzmichev, Andrey A. Sigarev, Denis I. Myakota, Sergey S. Zarubin, Pavel S. Chizov, Timofey V. Perevalov, Vladimir A. Gritsenko, Cheol Seong Hwang

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