Published in
Royal Society of Chemistry, Journal of Materials Chemistry C Materials for optical and electronic devices, 47(5), p. 12635-12644
DOI: 10.1039/c7tc03958a
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MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process
Journal article published in 2017 by
David Ditter,
Wei-Liang Chen,
Andreas Best,
Hans Zappe 
,
Kaloian Koynov,
Christopher K. Ober ,
Rudolf Zentel
,
Kaloian Koynov,
Christopher K. Ober ,
Rudolf Zentel
This paper was not found in any repository, but could be made available legally by the author.
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Abstract
LCE films can be patterned in the micrometer range with standard MEMS techniques.