Published in
Royal Society of Chemistry, Journal of Materials Chemistry C Materials for optical and electronic devices, 25(5), p. 6319-6327
DOI: 10.1039/c7tc01130j
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Tunable defect engineering in TiON thin films by multi-step sputtering processes: from a Schottky diode to resistive switching memory
Journal article published in 2017 by
Teng-Yu Su,
Chi-Hsin Huang,
Yu-Chuan Shih,
Tsang-Hsuan Wang,
Henry Medina 
,
Jian-Shiou Huang,
Hsu-Sheng Tsai ,
Yu-Lun Chueh
,
Jian-Shiou Huang,
Hsu-Sheng Tsai ,
Yu-Lun Chueh
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Abstract
The role of defect engineering is essential in resistive switching memory.