Anlan Chen - Dissemin

Language
Login

All papers authored by Anlan Chen

This paper was not found in any repository, but could be made available legally by the author.

2024 Yan Li, Huaizhi Luo, Anlan Chen

ORCID

, Xiaotong Mao, Fei Zhao, Jun Luo, Yongliang Li

ORCID

A novel approach to Si0.5Ge0.5 channel FinFET fabrication: utilizing a three-layer SiGe strain relaxation buffer and In-Situ phosphorus doping

Upload

This paper is made freely available by the publisher.

2023 Anlan Chen

ORCID

ORCID

, Xiaofeng Jia, Xiaohong Cheng, Wenwu Wang

Si_0.5Ge_0.5 Channel FinFET Preparation on an In Situ Doped SiGe SRB and Its Electrical Characteristics Optimization

Download from iopscience.iop.org

This paper is made freely available by the publisher.

Chun Li, Yongliang Li

ORCID

, Anlan Chen

ORCID

, Fei Zhao, Jun Luo, Wenwu Wang

SiGe Fin field effect transistor (FET) with STI liner skipping and channel passivation engineering

Download from link.springer.com

This paper is made freely available by the publisher.

2022 Anlan Chen

ORCID

, Chun Li, Qide Yao, Xueli Ma

ORCID

ORCID

, Wenwu Wang

Optimization of SiGe interface properties with ozone oxidation and a stacked HfO₂/Al₂O₃ dielectric for a SiGe channel FinFET transistor

Download from iopscience.iop.org

Missing publications? Search for publications with a matching author name.