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Laser micromachining of sputtered DLC films
Download from www.researchgate.netDevelopment of thermal actuators with multi-locking positions
Download from dx.doi.orgVariable RF capacitor based on a-Si:H (P-doped) multi-length cantilevers
Download from dx.doi.orgMicrogrippers for Biological Applications
UploadResidual stress in amorphous and nanocrystalline Si films prepared by PECVD with hydrogen dilution
Download from www.researchgate.netAbsence of enhanced stability in fully deuterated amorphous silicon thin-film transistors
Download from www.researchgate.netMicromirror structure actuated by TiNi shape memory thin films
Download from www.researchgate.netTiNi shape memory alloy based micropumps
UploadFabrication and characterization of diamond-like carbon/Ni bimorph normally closed microcages
Download from www.researchgate.netComparison of microtweezers based on three lateral thermal actuator configurations
Download from www.researchgate.netMicromirror structure based on TiNi shape memory thin films
Download from www.researchgate.netStability of fully deuterated amorphous silicon thin-film transistors
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