Vincent Garofano - Dissemin

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All papers authored by Vincent Garofano

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2019 Vincent Garofano

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, Remy Bérard, Xavier Glad, Christine Joblin

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, Kremena Makasheva

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Time‐resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSO

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V. Garofano

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, R. Bérard, S. Boivin, C. Joblin, K. Makasheva

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Multi-scale investigation in the frequency domain of Ar/HMDSO dusty plasma with pulsed injection of HMDSO

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Vincent Garofano

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, Florence Montpetit, Xavier Glad, Reetesh Kumar Gangwar, Luc Stafford

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Experiments and kinetic modeling of the ion energy distribution function at the substrate surface during magnetron sputtering of silver targets in radio frequency argon plasmas

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2015 V. Garofano

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, R. Clergereaux, K. Makasheva

Cyclic evolution of the electron temperature and density in dusty low-pressure radio frequency plasmas with pulsed injection of hexamethyldisiloxane

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