Daniel F. Sunday - Dissemin

All papers authored by Daniel F. Sunday

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2020 Daniel F. Sunday

, Moshe Dolejsi, Alice B. Chang, Lee J. Richter

, Ruipeng Li, R. Joseph Kline, Paul F. Nealey

, Robert H. Grubbs

Confinement and Processing Can Alter the Morphology and Periodicity of Bottlebrush Block Copolymers in Thin Films

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Daniel F. Sunday

, Alexandros Chremos

, Tyler B. Martin

, Alice B. Chang, Adam B. Burns

, Robert H. Grubbs

Concentration Dependence of the Size and Symmetry of a Bottlebrush Polymer in a Good Solvent

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Ji Yeon Kim

, Philip Liu, Michael J. Maher

, Devon H. Callan

, Christopher M. Bates

, Matthew C. Carlson, Yusuke Asano, Gregory Blachut

, Charles T. Rettner, Joy Y. Cheng, Daniel F. Sunday

, R. Joseph Kline, Daniel P. Sanders, Nathaniel A. Lynd

, Christopher J. Ellison and 2 other authors

Spatial Control of the Self-assembled Block Copolymer Domain Orientation and Alignment on Photopatterned Surfaces

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This paper was not found in any repository, but could be made available legally by the author.

Daniel F. Sunday

, Tyler B. Martin

, Alice B. Chang

, Adam B. Burns, Robert H. Grubbs

Addressing the challenges of modeling the scattering from bottlebrush polymers in solution

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Daniel F. Sunday

, Xuanxuan Chen, Thomas R. Albrecht, Derek Nowak, Paulina Rincon Delgadillo, Takahiro Dazai, Ken Miyagi, Takaya Maehashi, Akiyoshi Yamazaki, Paul F. Nealey

, R. Joseph Kline

Influence of Additives on the Interfacial Width and Line Edge Roughness in Block Copolymer Lithography

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2019 Daniel F. Sunday

, Florian Delachat

, Ahmed Gharbi, Guillaume Freychet

, Christopher D. Liman, Raluca Tiron

, R. Joseph Kline

X-ray characterization of contact holes for block copolymer lithography

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This paper is made freely available by the publisher.

Daniel F. Sunday

, Wen-Li Wu, Scott Barton, R. Joseph Kline

X-ray Metrology for the SemiconductorIndustry Tutorial

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2018 Daniel F. Sunday

, R. Joseph Kline

Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures

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Ronald J. Pandolfi

, Daniel B. Allan, Elke Arenholz, Luis Barroso-Luque, Stuart I. Campbell, Thomas A. Caswell, Austin Blair, Francesco De Carlo, Sean Fackler, Amanda P. Fournier, Guillaume Freychet, Masafumi Fukuto, Dogˇa Gürsoy, Zhang Jiang, Harinarayan Krishnan and 22 other authors

Xi-cam: a versatile interface for data visualization and analysis

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Daniel F. Sunday

, Edwin P. Chan, Sara V. Orski, Ryan C. Nieuwendaal, Christopher M. Stafford

Functional group quantification of polymer nanomembranes with soft x-rays

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Guillaume Freychet, Patrick Naulleau, Ronald Pandolfi, Dinesh Kumar, Joe Strzalka, Daniel Sunday

, Alexander Hexemer, Joseph R. Kline, Daniel Staacks, Masafumi Fukuto

Critical-dimension grazing incidence small angle x-ray scattering

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Adam F. Hannon

, Daniel F. Sunday

, Alec Bowen, Gurdaman Khaira, Jiaxing Ren, Paul F. Nealey, Juan J. de Pablo

, R. Joseph Kline

Optimizing self-consistent field theory block copolymer models with X-ray metrology

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2017 Daniel F. Sunday

, Michael J. Maher

, Adam F. Hannon

, Christopher D. Liman, Summer Tein, Gregory Blachut

, Yusuke Asano, Christopher J. Ellison

, C. Grant Willson

, R. Joseph Kline

Characterizing the Interface Scaling of High χ Block Copolymers near the Order–Disorder Transition

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Christopher D. Liman, Thomas A. Germer, Daniel F. Sunday

, Dean M. DeLongchamp, R. Joseph Kline

Modeling the polarized X-ray scattering from periodic nanostructures with molecular anisotropy

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Gurdaman Khaira, Manolis Doxastakis, Alec Bowen, Jiaxing Ren, Hyo Seon Suh, Tamar Segal-Peretz

, Xuanxuan Chen, Chun Zhou, Adam F. Hannon

, Nicola J. Ferrier, Venkatram Vishwanath, Daniel F. Sunday

, Roel Gronheid, R. Joseph Kline, Juan J. de Pablo

and 1 other authors

Derivation of Multiple Covarying Material and Process Parameters Using Physics-Based Modeling of X-ray Data

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Daniel F. Sunday

, Jiaxing Ren, Christopher D. Liman, Lance D. Williamson, Roel Gronheid, Paul F. Nealey

, R. Joseph Kline

Characterizing Patterned Block Copolymer Thin Films with Soft X-rays

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R. Joseph Kline, Daniel F. Sunday

, Donald Windover, Benjamin D. Bunday

X-ray scattering critical dimensional metrology using a compact x-ray source for next generation semiconductor devices

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2016 Daniel F. Sunday

, Michael J. Maher, Summer Tein, Matthew C. Carlson, Christopher J. Ellison, C. Grant Willson, R. Joseph Kline

Quantifying the Interface Energy of Block Copolymer Top Coats

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Adam F. Hannon, Daniel F. Sunday

, Donald Windover, R. Joseph Kline

Advancing x-ray scattering metrology using inverse genetic algorithms

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All papers authored by Daniel F. Sunday