Kristof Marcoen
researchportal.vub.be
0000-0003-2831-483X
Vrije Universiteit Brussel
21 papers found
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Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties
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