Refreshing results…
Biocompatible “click” wafer bonding for microfluidic devices
Download from www.researchgate.netAwafer-level, heterogeneously integrated, high flow SMA-silicon gas microvalve
Download from kth.diva-portal.orgElectrostatic gating of ion and molecule transport through a nanochannel-array membrane
Download from kth.diva-portal.orgInertial particle focusing in parallel microfluidic channels for high-throughput filtration
Download from www.researchgate.netLow-stress wafer-level transfer bonding of polymer layers using floatation
Download from www.researchgate.netWafer-level mechanical and electrical integration of SMA wires to silicon MEMS using electroplating
Download from www.researchgate.netA High-Yield Process for 3-D Large-Scale Integrated Microfluidic Networks in PDMS
Download from www.researchgate.netDesign and Wafer-Level Fabrication of SMA Wire Microactuators on Silicon
Download from www.researchgate.netFluid dynamic behavior of dispensing small droplets through a thin liquid film
Download from www.researchgate.netLocalized removal of the Au–Si eutectic bonding layer for the selective release of microstructures
Download from www.researchgate.netFull wafer integration of shape memory alloy microactuators using adhesive bonding
Download from www.researchgate.netSelective electrochemical release etching of eutectically bonded microstructures
Download from www.researchgate.netMicrochannels with Substantial Friction Reduction at Large Pressure and Large Flow
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