Jon Tomas Gudmundsson
University of California
90 papers found
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Growth of HfN thin films by reactive high power impulse magnetron sputtering
Download from doi.orgOn electron heating in a low pressure capacitively coupled oxygen discharge
Download from arxiv.orgAre the argon metastables important in high power impulse magnetron sputtering discharges?
Download from liu.diva-portal.orgIon Energy and Angular Distributions in a Dual-Frequency Capacitively Coupled Chlorine Discharge
UploadRutile TiO2 thin films grown by reactive high power impulse magnetron sputtering
Download from www.researchgate.netOn sheath energization and Ohmic heating in sputtering magnetrons
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