Ian Boyd
Melbourne Centre for Nanofabrication
284 papers found
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Growth Rate Enhancement Using Ozone during Rapid Thermal Oxidation of Silicon
Download from www.researchgate.netGrowth and modeling of cw‐UV induced oxidation of silicon
Download from www.researchgate.netOzone-Induced Rapid Low Temperature Oxidation of Silicon
Download from www.researchgate.netLow pressure photodeposition of silicon nitride films using a xenon excimer lamp
Download from www.researchgate.netUV-assisted oxidation of SiGe strained layers
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